Silicon oxide (SiO2) - Er-doped Si-rich SiO2 (Er:SiOx)  

Sample preparation

Silicon oxide sample: SiO2 thin films were deposited on Si wafer by dielectric chemical vapor deposition (DCVD). Sample provided by Rupa Das (rupadas@mit.edu).

Er-doped Si-rich SiO2 samples: Er:SiOx thin films were deposited on Si wafer through RF cosputtering from Er and Si targets in O2/Ar gas mixture and were then annealed at 600o C for 1 hour in N2. The samples were prepared by Mike Stolfi (stolfi@mit.edu).

Results


 
  
SiO2


Er:SiOx


Wavelength (microns)
n
k
Wavelength (microns)
n
k
0.248
0.253
0.258
0.264
0.270
0.276
0.282
0.288
0.295
0.302
0.310
0.318
0.326
0.335
0.344
0.354
0.365
0.376
0.388
0.400
0.413
0.428
0.443
0.459
0.477
0.496
0.517
0.539
0.564
0.590
0.620
0.653
0.689
0.729
0.775
0.827
0.886
0.954
1.033
1.127
1.240
1.378
1.550
1.771
2.066
2.197
2.415
2.632
2.849
3.066
3.283
3.500
3.718
3.935
4.152
4.369
4.586
4.803
5.021
5.238
5.455
5.672
5.889
6.106
6.324
6.541
6.758
6.975
7.192
7.409
7.627
7.844
8.061
8.278
8.495
8.712
8.930
9.147
9.364
9.581
9.798
10.015
10.233
10.450
10.667
10.884
11.101
11.318
11.536
11.753
11.970
12.187
12.404
12.621
12.839
13.056
13.273
13.490
13.707
13.924
14.142
14.359
14.576
14.793
15.010
15.227
15.445
15.662
15.879
16.096
16.313
16.530
16.748
16.965
17.182
17.399
17.616
17.834
18.051
18.268
18.485
18.702
18.919
19.137
19.354
19.571
19.788
1.509
1.506
1.503
1.501
1.498
1.496
1.494
1.491
1.489
1.487
1.485
1.483
1.481
1.480
1.478
1.476
1.475
1.473
1.472
1.470
1.469
1.467
1.466
1.465
1.464
1.463
1.461
1.460
1.459
1.458
1.457
1.457
1.456
1.455
1.454
1.453
1.452
1.451
1.450
1.449
1.448
1.446
1.444
1.441
1.437
1.435
1.431
1.427
1.422
1.417
1.412
1.406
1.399
1.394
1.384
1.373
1.363
1.352
1.341
1.327
1.313
1.296
1.277
1.254
1.229
1.197
1.158
1.100
1.034
0.947
0.826
0.584
0.394
0.454
0.472
0.422
0.372
1.428
2.392
2.779
2.814
2.679
2.474
2.291
2.133
1.996
1.874
1.798
1.723
1.654
1.617
1.654
1.720
1.780
1.811
1.798
1.764
1.736
1.708
1.683
1.659
1.637
1.618
1.599
1.583
1.567
1.549
1.531
1.512
1.495
1.478
1.461
1.443
1.425
1.406
1.385
1.362
1.340
1.308
1.274
1.240
1.205
1.169
1.090
0.997
0.903
0.783
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0.0324
0.105
0.438
0.717
0.924
1.202
1.853
2.604
2.090
1.481
0.884
0.493
0.260
0.140
0.0746
0.0471
0.0505
0.0730
0.103
0.150
0.233
0.318
0.342
0.321
0.270
0.213
0.182
0.170
0.161
0.157
0.157
0.158
0.163
0.168
0.173
0.178
0.184
0.191
0.198
0.207
0.217
0.228
0.239
0.250
0.261
0.273
0.285
0.297
0.310
0.325
0.339
0.356
0.373
0.401
0.450
0.513
0.660
0.255
0.273
0.290
0.307
0.325
0.342
0.360
0.377
0.395
0.412
0.430
0.447
0.464
0.482
0.499
0.517
0.534
0.552
0.569
0.587
0.604
0.621
0.639
0.656
0.674
0.691
0.709
0.726
0.744
0.761
0.779
0.796
0.813
0.831
0.848
0.866
0.883
0.901
0.918
0.936
0.953
0.971
0.988
1.005
1.023
1.040
1.058
1.075
1.093
1.110
1.128
1.145
1.162
1.180
1.197
1.215
1.232
1.250
1.267
1.285
1.302
1.320
1.337
1.354
1.372
1.389
1.407
1.424
1.442
1.459
1.477
1.494
1.511
1.529
1.546
1.564
1.581
1.599
1.616
1.634
1.651
1.669
1.686
1.703
1.721
1.738
1.756
1.773
1.791
1.808
1.826
1.843
1.860
1.878
1.895
1.913
1.930
1.948
1.965
1.983
2.000

1.622
1.571
1.508
1.468
1.720
1.752
1.708
1.678
1.660
1.650
1.643
1.636
1.629
1.623
1.618
1.614
1.610
1.607
1.604
1.602
1.600
1.598
1.596
1.595
1.594
1.592
1.591
1.590
1.590
1.589
1.588
1.588
1.587
1.587
1.586
1.586
1.585
1.585
1.585
1.584
1.584
1.584
1.584
1.583
1.583
1.583
1.583
1.583
1.582
1.582
1.582
1.582
1.582
1.582
1.581
1.581
1.581
1.581
1.581
1.581
1.581
1.581
1.581
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.580
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.579
1.578
1.578
1.578
1.578
1.578

0.0322
0.0372
0.0711
0.2150
0.2802
0.1085
0.0518
0.0332
0.0263
0.0217
0.0161
0.0112
0.00770
0.00530
0.00365
0.00251
0.00171
0.00114
0.000747
0.000472
0.000288
0.000171
0.000104
0.000074
0.000070
0.000085
0.000112
0.000146
0.000184
0.000222
0.000260
0.000294
0.000325
0.000351
0.000372
0.000389
0.000401
0.000409
0.000412
0.000412
0.000409
0.000403
0.000395
0.000385
0.000372
0.000359
0.000344
0.000329
0.000313
0.000296
0.000280
0.000263
0.000246
0.000229
0.000212
0.000196
0.000180
0.000165
0.000149
0.000135
0.000120
0.000106
0.000093
0.000080
0.000067
0.000055
0.000044
0.000033
0.000022
0.000012
0.000006
0.000002
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0